The component that have to be replaced on regular basis due to wear or degradation

other than expendables are shown in the table below. Regardless of whether a device is described in the table below or not, all air devices have to be replaced with new ones if oil or water is mixed into the air of them

1, 40050034 ejector 70 assemly head

2, 40050035 ejector 80 assembly head

3, 40046642 magnetic scable wiper 4 XY

4, 40058384 Y paired cable assembly 1 Y

5, 40058385 XY paired cable assembly 1 XY

6, 40080206 LA Sensor paired cable assembly XY

7, 40046022  Y plastic rail. 1 Y

8, 40046023 X plastic rail 1 X

9, 40044517  1394 robot cable assembly. XY

10, 40044543 Optical fiber cable 7M. XY

11, PF901002000 Filter element A(rear stage) cover

12, PF901006000 Filter element B (front side)  cover

13, PF901007000 Filter element.  cover

14, 40001471 Gas Spring A 2 Cover

15, 40001454 Gas Spring B  2  Cover

16, E9649729000 HOD assembly

17, E9662729000 HOD assembly (for EN)

18, E9619729000 FDD optional

19, 40105524 SSD assembly for ACP-128J

20, 40113588 SSD assembly for ACP-132-C18J

21 40099750 SSD assembly for MES

22 40025669 LCD monitor

23, 40028131 LCD monitor for coplanarity